ET4260 Microsystem integration

Topics: Fundamental and practical aspects of integrated microsystems in silicon

Basically, the Microsystem is a complete instrument on a chip. The challenges associated with the integration of the transducer and circuits into a single-chip integrated system are more than compensated by the opportunities this concept offers in a wide range of applications.

Firstly, the general issues related to system structure are discussed within the context of a microsystem. Secondly, a brief overview of IC-compatible microsystem technologies is given. Thirdly, approaches for multi-domain modeling are discussed. Finally, the software package COMSOL is introduced. Only 12 lecture hours are programmed in this course. The emphasis is on the subsequent individual project that involves the analysis or design of a microsystem.

Study Goals

This course teaches the fundamental and practical aspects of integrated microsystems in silicon. The student will be able to assess the merits, complications and limitations of this approach and to put these into the perspective of a particular application. As a result the student will be able to make well-decided conclusions on functional structure of the microsystem and the approach for fabrication to be taken. Finally, the student will be able pass the first phase in the design of a microsystem (on paper with global verification using software tools).

Teachers Andre Bossche

Integrated Sensors, Nano-Fluidic Devices and Packaging Technology

dr. Tomás Manzaneque

Microsystems, piezoelectric devices, ultrasound transducers, resonant sensors, acoustic devices.

prof.dr. Paddy French

Biomedical devices, sensor technology

Last modified: 2022-06-19


Credits: 4 EC
Period: 0/0/0/3