dr. P Gennissen

1. Fabrication of a beam-mass structure using single-step electochemical etching for micro structures (SEEMS)
   H. Ohji; P.T.J. Gennissen; P.J. French; K. Tsutsumi;
   Journal of Micromechanics and Microengineering,
   Volume 10, Issue 3, pp. 440-444, 2000.

2. Fabrication of accelerometer using single-step electrochemical etching for micro structures (SEEMS)
   H. Ohji; P.T.J. Gennissen; P.J. French; K. Tsutsumi;
   IEEE, , pp. 1-5, 1999.

3. Combination of Epi-Poly and Electropolishing for Fabrication of Accelerometers with Large Substrate Separation Gaps
   P.T.J. Gennissen; H. Ohji; P.J. French; C.M.A. Ashruf; G.M. O'Halloran; P.M. Sarro;
   In Proc. XIII Eurosensors Conf.,
   The Hague, The Netherlands, pp. 1029-1032, Sept. 1999.

4. Development of silicon accelerometers using epi-micromachining
   P.T.J. Gennissen; P.J. French;
   In {P.J. French}; {E Peeters} (Ed.), Micromachined devices and components V (Proceedings of SPIE 3876),
   International Society for Optical Engineering, pp. 84-92, 1999.

5. Combination of epipoly and electropolishing for fabrication of accelerometers with large substrate separation gaps
   P.T.J. Gennissen; H. Ohji; P.J. French; C.M.A. Ashruf; G.M.O. O. Halloran; P.M. Sarro;
   In {M. Bartek} (Ed.), Eurosensors XIII: proceedings [CD-ROM],
   Delft University of Technology, pp. 1029-1032, 1999.

6. New silicon micromachining techniques for microsystems
   P.J. French; P.T.J. Gennissen; P.M. Sarro;
   Sensors and Actuators A: Physical,
   Volume 62, Issue 1-3, pp. 652-662, Jul. 1997.

7. Bipolar-compatible epitaxial poly for smart sensors: stress minimization and applications
   P.T.J. Gennissen; M. Bartek; P.J. French; P.M. Sarro;
   Sensors and Actuators A,
   Volume 62, pp. 636-645, 1997.

8. Bulk micromachined pressure sensor based on epi-poly technique
   P.T.J. Gennissen; C.M.A. Ashruf; M. Kaak; P.J. French; P.M. Sarro;
   In Proc.SPIE Micromachining and Microfabrication '97 Symposium,
   Austin, Texas, USA, SPIE, pp. 212-219, Sep. 1997.

9. Study of Selective and Non-Selective Deposition of Single- and Polycrystalline Silicon Layers in an Epitaxial Reactor
   M. Bartek; P.T.J. Gennissen; P.J. French; P.M. Sarro; R.F. Wolffenbuttel;
   In Proc. Transducers 97,
   Chicago, USA, pp. 1403-1406, Jun. 1997.

10. Bipolar compatible epitaxial poly for surface micromachined smart sensors
    P.T.J. Gennissen; P.J. French; M. Bartek; P.M. Sarro; A. van den Boogaard; C. Visser;
    In Proc. SPIE Conference on Micromachining & Microfabrication, Process Technology II,
    Austin, USA, SPIE, pp. 135-142, Oct. 1996.

11. New developments in the integration of micromachined sensors
    P.M. Sarro; P.J. French; P.T.J. Gennissen;
    In Proc. SPIE Micromachining and Microfabrication 1996 Symposium,
    Austin, Texas, USA, SPIE, pp. 26-36, Oct. 1996.

12. Bipolar compatible epitaxial poly for smart sensors - stress minimization and applications
    P.T.J. Gennissen; M. Bartek; P.J. French; P.M. Sarro;
    In Proc. Eurosensors X,
    Leuven, Belgium, pp. 187-190, Sep. 1996.

13. New micromachining techniques for microsystems
    P.J. French; P.T.J. Gennissen; P.M. Sarro;
    In Proc. Eurosensors '96 Conf.,
    Leuven, Belgium, pp. 465-472, Sep. 1996.

14. Thick polysilicon microstructures by combination of epitaxial and poly growth in a single deposition step
    P.T.J. Gennissen; M. Bartek; P.J. French; P.M. Sarro;
    In Proc. 1996 National Sensor Conference,
    Delft, The Netherlands, pp. 189-192, Mar. 1996.

15. New etchant for the fabrication of porous silicon
    G.M. O'Hallaran; M. Kuhl; P.M. Sarro; P.T.J. Gennissen; P.J. French;
    In Moustakas, Dismukes, Pearton) (Ed.), Proc. 189th Electrochemical Society Meeting: III-V Nitride Materials and Compounds,
    Los Angeles, California, USA, pp. 180-185, May 1996.

16. Automatic etch stop on buried oxide using epitaxial lateral overgrowth
    P.T.J. Gennissen; M. Bartek; P.J. French; P.M. Sarro; R.F. Wolffenbuttel;
    In Transducers 95,
    Stockholm, Sweden, pp. 75-78, Jun. 1995.

17. An integrated silicon colour sensor using selective epitaxial growth
    M. Bartek; P.T.J. Gennissen; P.M. Sarro; P.J. French; R.F. Wolffenbuttel;
    Sensors and Actuators A,
    Volume 41, Issue 1-3, pp. 123-128, Apr. 1994.

18. A Novel Silicon Colour Sensor Using Selective Epitaxial Growth
    M. Bartek; P.T.J. Gennissen; E.J. Blaauw; P.M. Sarro; P.J. French; R.F. Wolffenbuttel;
    In Proc. 7th Int. Conf. Solid-State Sensors and Actuators (Transducers 93),
    Yokohama, Japan, pp. 144-147, Jun. 1993.

19. Selective epitaxial growth for smart silicon sensor applications
    M. Bartek; P.T.J. Gennissen; P.M. Sarro; P.J. French; R.F. Wolffenbuttel;
    In Proc. Eurosensors VII,
    Budapest, Hungary, Sep. 1993.

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